Metrology is used at many points in the production of semiconductors. Uses include the measurement of layers, the shape of the surface, the shape of specific devices, and defect detection in
materials.
This
simulation illustrates 4 different techniques that are commonly used:
Spectrophotometry, Ellipsometry, Opto-acoustics, and Scanning Tunneling
Microscopy. Try it and learn what these intriguing systems do!
Tell a friend about
this Metrology simulation