TRY IT! Advanced Process Control - open loop vs. closed loop

<body><table dir="ltr" border="0" cellpadding="0" cellspacing="0" width="100%"><tr><td valign="top"> <a href="index.html"></a> <a href="momentum.htm"></a> <a href="vision.htm"></a> <a href="questerapt.htm"></a> <a href="grid.htm"></a> <a href="semiproc.htm"></a> <a href="litho.htm"></a> <a href="stepvscan.htm"></a> <a href="met.htm"></a> <a href="whycmp.htm"></a> <a href="PTI.htm"></a> <a href="pti_spanish.htm"></a> <a href="sealcheck.htm"></a> <a href="copper.htm"></a> <p>Advanced Process Control - open loop vs. closed loop</p> <p> Advanced Process Control measures product parameters and uses the results to fine-tune the manufacturing process.</p> <p>In semiconductor manufacturing, advanced process control is most widely used in Chemical Mechanical Planarization (CMP).</p> </td></tr></table><table border="0" cellpadding="0" cellspacing="0" width="100%"><tr><td> <p><font face="Arial" size="1">Copyright 1998-<span lang="en-us">2011</span> Qameleon Technology, Inc.</font> </p> </td></tr></table></body>